Picture of Atom Probe Tomography_EiKOS UV
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Atom probe tomography (APT) is a unique and powerful atom-by-atom 3D imaging technique with sub-nm spatial resolution. Equal detection efficiency of nearly all elements enables analysis of nanoscale features such as precipitates, grain boundaries, defects, and clusters.

The EIKOS-UV instrument is a workhorse APT equipped with a UV-laser which widens the application range including metals, coatings, thin films, ceramics, minerals, functional materials.   

Technical information

  • Flight path type: Large Angle Reflectron.
  • Detection efficiency: 36%.
  • Minimum specimen temperature (K): 40.
  • Voltage Pulse Amplitude (max.): 2000V.
  • Voltage Pulse Repetition Rate (max.): 100 kHz.
  • Laser Pulse Repetition Rate (max.): 200 kHz.
  • Laser wavelength: 355 nm.
  • Laser Spot size (diameter): ≤ 5 micron.
  • Minimum detection rate (DR, %): 0.10%.
  • Software: APSuite.

The instrument uses an integrated local electrode (ILE) design. This means only wire geometry samples are accepted, samples and ILE are mounted to the specimen puck ex-situ.  

Auxiliary equipment includes an electropolishing micro-loop for production of specimen from a wide variety of materials and advanced accessories for FIB-based specimen preparation.

Tool name:
Atom Probe Tomography_EiKOS UV
Area/room:
L055
Category:
Other processes
Manufacturer:
Cameca
Model:
EIKOS-UV

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