The Nova 600 NanoLab is a Dual-Beam system (combining ultra-high resolution SEM and Focused Ion Beam). This is a complete nanotechnology lab in a single tool, which enables nanoscale chemical synthesis, top-down machining, deposition, nanoscale prototyping, 2D and 3D-characterization and analysis of nanostructures below 100 nm. It combines ultra-high resolution field emission scanning electron microscopy, precise focused ion beam etch and deposition and analysis.

The Nova 600 NanoLab is a FIB (Focused Ion Beam)/SEM workstation capable of Nano-chemistry, Nano-prototyping, Nano-machining, Nano-characterization and Nano-Analysis. The key enabling technologies are all integrated into a single platform:

• A fully integrated cryo transfer system with nitrogen cold stage allowing for high-resolution imaging of liquid and wet specimen, soft polymers and tissues, including cell cultures. No need of fixing and staining the cells for obtaining high-resolution images, 3D tomography and reconstruction.
• Automated, unattended TEM sample preparation and in-situ TEM sample lift-out. The Nova is equipped with a micromanipulator for TEM sample preparation (“lift-out process”) or other manipulations of the specimen.
• High-resolution STEM Brightfield and Darkfield detector.
• Ultra-high resolution electron optics (magnetic immersion lens with ultra-high brightness Sirion emitter) with SE and BSE in-lens detection and STEM imaging - High-resolution (field emission) Ion Optics (Magnum™ column)
• Advanced control of Gas Chemistries including gasses such as Delineation Etch, Selective Carbon Mill, Au and Co depositions (8 different chemistries).
• High-precision specimen goniometer with full 150 mm travel along the x and y-axes
• A high-resolution 4k digital patterning engine
• Automation with full access to E-beam, I-beam, patterning and gas chemistry functionality
• A fully integrated EDS system that is capable of point analysis, and elemental mapping with pattern recognition.
• A fully integrated, EBSD system, capable of acquiring, indexing and displaying high-resolution EBSD data. Recently upgraded to the state-of-the-art CMOS detector from Oxford Instruments "Symmetry", which combines both accuracy and speed. More information on this detector can be obtained here. 

The system architecture is optimized for automation, AutoFIB, AutoTEM, Auto-Slice-and-View, with the availability of custom scripting to suit particular application needs. 

The operation manual of this instrument can be downloaded here.